3D Optical Profilometry - Soares and Walsh - MRL 05072020

With advances in confocal optical microscopy and processing software, 3D optical profilometry became a versatile and easy-to-use technique for measuring surface topography. The technique is complementary to AFM and stylus profilometry for measurements of surface roughness and sample profiles. In addition, 3D optical profilers based on confocal microscopy can produce fully focused optical micrographs of samples with features taller than the depth of focus of the microscope.