Lecture 10 | Etching: Wet & Dry Etching Techniques | VLSI Technology

In this lecture, we discuss etching, an important process used for pattern transfer during semiconductor fabrication. Topics covered: • Etching • Wet etching • Wet chemical etching • Etching mechanism • Etch rate • Dry etching • Plasma etching • Comparison of wet and dry etching 📚 Course: EEE-475 VLSI Technology