Part 1: Surface Profiler for Film Thickness Measurement (DekTakXT Bruker)

Created by Mohd Azwadi Bin Omar Coordinated by Dr Soon Chin Fhong -------------------------------------- Microelectronic and Nanotechnology-Shamsuddin Research Center  Institute for Integrated Engineering  Universiti Tun Hussein Onn Malaysia 86400 Parit Raja, Batu Pahat, Johor. Malaysia