Unsupervised Anomaly Detection, Semiconductor Manufacturing

2026년 8월 26일 진행된 SPS Lab. 논문 세미나 자료입니다. 참조 [1] Sorensen, Daniel, et al. "Unsupervised Anomaly Prediction with N-BEATS and Graph Neural Network in Multi-variate Semiconductor Process Time Series." arXiv preprint arXiv:2510.20718 (2025). [2] Yin, Yuxuan, et al. "Diffuse to Detect: Generative Diffusion Models for Unsupervised IC Anomaly Detection." arXiv preprint arXiv:2605.26468 (2026). Smart Production Systems Lab. (sps.korea.ac.kr) Korea University