Scanning Acoustic Tomograph "FineSAT7" contributing to higher image quality of defect detection

As power semiconductor devices and electronic components have been made in more miniaturized size in recent years, higher-quality inspections are required more than ever, especially higher image quality for defect detection and improvements in workability and productivity. Hitachi Power Solutions has a wealth of experience in the domestic and overseas market, including sales of approximately 2,800 units* of "FineSAT" series as a non-destructive device for detecting and imaging microscopic structures and defects inside semiconductor devices and electronic components by utilizing the reflective and transmissive properties of ultrasonic waves. This movie introduces the latest model Scanning Acoustic Tomograph "FineSAT7" that enables higher image quality of defect detection such as delamination and voids that occur on the inner surface of devices and one-time inspection for 300mm(12-inch) wafers. As of July 2026