ALD Short Course in English - 3. Basic Growth Characteristics of ALD

3. Basic Growth Characteristics of ALD Content: Surface self-saturation, surface reactions, reactants Chapters 1. Review of Fundamentals 2. Introduction of ALD 3. Basic Growth Characteristics of ALD 4. ALD Precursors & Reactants 5. ALD Systems 6. ALD Applications for Si Devices 7. Atomic Crafting Beyond ALD Lecturer: Prof. Han-Bo-Ram Lee hbrlee@inu.ac.kr http://nanomaterial.kr