W-208 Sputter Deposition (trailer)

Course Outline: This course emphasizes issues of practical importance to those using sputtering as a manufacturing process. It is intended for engineers, scientists and technicians who would like an understanding of the factors that influence product throughput, coating quality, and process robustness and reliability. The primary focus will be on the use of planar magnetrons of various shapes, but other sources will be covered as well. The relationships between the sputtering conditions and important film properties- such as microstructure, composition, stress, and adhesion will be discussed. New developments that are finding their way into practical applications will also be highlighted. No prior formal training in sputtering is required.